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Conformal Boron filling in high aspect ratio deep holes by Chemical Vapor Deposition (CVD) using different boron precursors for solid state neutron detection and related applications
RPI ID: 2013-012-201 & 2013-012-601Innovation Summary:This dual-invention brief introduces advanced solid-state neutron detection systems and fabrication methods that offer compact, efficient, and scalable alternatives to traditional gas-based detectors. These devices utilize wide-bandgap semiconductor materials such as gallium nitride (GaN), integrated...
Published: 7/21/2025
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Updated: 7/3/2025
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Inventor(s): Ishwara Bhat, Rajendra Dahal, Yaron Danon, Kuan-Chih Huang, Ning Lu
Keywords(s):
Category(s): Energy, Environment and Smart Systems
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