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A technique to integrate displacement limiters having nanoscale resolution in microelectromechanical (MEMS) systems
RPI ID: 2015-047-401Innovation Summary:This invention provides a method for controlling shuttle mass motion in MEMS (Micro-Electro-Mechanical Systems) devices using nanoscale sidewall stoppers. The process includes patterning a silicon substrate to form suspended structures such as a shuttle mass and anchor frame, followed by selective deposition using...
Published: 7/21/2025
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Updated: 7/3/2025
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Inventor(s): Diana-Andra Borca-Tasciuc, Mona Hella, John Oxaal
Keywords(s): Barium titanate, displacement limiting feature or part, MEMS, NEMS, Safety
Category(s): Energy, Environment and Smart Systems
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