RPI ID: 2021-051-201

Innovation Summary:
Polarimetric coherent diffraction imaging systems utilize metasurface optics to capture polarization-sensitive diffraction patterns without traditional lenses. These systems operate effectively in the VUV-EUV-SXR spectral regions and support arbitrary angles of incidence. The approach enables near-wavelength-limited resolution and compact optical configurations. Applications include nanoscale imaging and material characterization.

Challenges / Opportunities:
Conventional imaging systems face limitations in resolution and complexity when operating in short-wavelength regimes. This invention eliminates the need for imaging optics, reducing bulk and improving performance. It enables compact, high-resolution imaging for scientific and industrial use. Polarization sensitivity enhances contrast and material differentiation.

Key Benefits / Advantages:
✔ Lensless high-resolution imaging
✔ Polarization-sensitive detection
✔ Compact optical design
✔ Applicable to short-wavelength regimes
✔ Enhanced material contrast

Applications:
• Nanoscale imaging
• Material characterization
• Semiconductor inspection

Keywords:
#coherentdiffraction #polarimetry #metasurfaceoptics #shortwavelengthimaging #materialanalysis #lenslessimaging

Intellectual Property:
US Application 18/109525 US20230258560A1 filed 14-Feb-2023